Ion beam processes in advanced electronic materials and device technology. symposium...

APPLETON, B.R. , F.H. EISEN and T.W. SIGMON. (eds).

Materials Research Society, Pittsburgh, 1985

ISBN: 0931837103

24 cm. original hardcover. xvi,394 pp. ills, diagrams. references. index. "Materials Research Society Symposia Proceedings". -(very) good.